Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach

Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the in uence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application. A solution to combine the bene ts of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP). Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and rst simulation results are presented.