Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach

Michael Friedrichs; Junbo Gong; Ralf Peter Brinkmann; Jens Oberrath; Sebastian Wilczek

Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach

Michael Friedrichs
, Junbo Gong
, Ralf Peter Brinkmann
, Jens Oberrath
, Sebastian Wilczek

Institut für Produktionstechnik und –systeme

Ruhr-Universität Bochum

Publikation: Beiträge in Zeitschriften › Konferenz-Abstracts in Fachzeitschriften › Forschung › Begutachtung

Abstract

Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the influence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application.
A solution to combine the benefits of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP).
Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and first simulation results are presented.

Originalsprache	Englisch
Zeitschrift	Bulletin of the American Physical Society
Jahrgang	61
Ausgabenummer	9
Seiten (von - bis)	42
Seitenumfang	1
ISSN	0003-0503
Publikationsstatus	Erschienen - 11.10.2016

Bibliographische Notiz

69th Annual Gaseous Electronics Conference, October 10–14, 2016; Bochum, Germany.
Abstract: HT6.00041

Fachgebiete und Schlagwörter

Ingenieurwissenschaften

Zugriff auf Dokument

http://meetings.aps.org/Meeting/GEC16/Session/HT6.41Lizenz: Andere

2 Abgeschlossen

Kinetische Modellierung und Simulation der planaren Multipolresonanzsonde
Oberrath, J. (Wissenschaftliche Projektleiter*in) & Friedrichs, M. (Projektmitarbeiter*in)
Deutsche Forschungsgemeinschaft
01.07.17 → 15.07.20
Projekt: Forschung
Nachweis eines kinetischen Einflusses auf die Resonanzverbreiterung im Spektrum eines Sensors zur aktiven Plasmaresonanzspektroskopie
Oberrath, J. (Wissenschaftliche Projektleiter*in)
01.10.15 → 14.01.17
Projekt: Forschung

Dieses zitieren

@article{38e5b782ff314d07bd6d5e9973e184a7,

title = "Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach",

abstract = "Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the in uence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application. A solution to combine the bene ts of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP). Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and rst simulation results are presented.",

keywords = "Engineering",

author = "Michael Friedrichs and Junbo Gong and Brinkmann, \{Ralf Peter\} and Jens Oberrath and Sebastian Wilczek",

note = "69th Annual Gaseous Electronics Conference, October 10–14, 2016; Bochum, Germany. Abstract: HT6.00041",

year = "2016",

month = oct,

day = "11",

language = "English",

volume = "61",

pages = "42",

journal = "Bulletin of the American Physical Society",

issn = "0003-0503",

publisher = "American Physical Society",

number = "9",

}

TY - JOUR

T1 - Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach

AU - Friedrichs, Michael

AU - Gong, Junbo

AU - Brinkmann, Ralf Peter

AU - Oberrath, Jens

AU - Wilczek, Sebastian

N1 - 69th Annual Gaseous Electronics Conference, October 10–14, 2016; Bochum, Germany. Abstract: HT6.00041

PY - 2016/10/11

Y1 - 2016/10/11

N2 - Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the in uence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application. A solution to combine the bene ts of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP). Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and rst simulation results are presented.

AB - Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the in uence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application. A solution to combine the bene ts of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP). Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and rst simulation results are presented.

KW - Engineering

M3 - Conference abstract in journal

SN - 0003-0503

VL - 61

SP - 42

JO - Bulletin of the American Physical Society

JF - Bulletin of the American Physical Society

IS - 9

ER -

Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach

Abstract

Bibliographische Notiz

Fachgebiete und Schlagwörter

Zugriff auf Dokument

Fingerprint

Projekte

Kinetische Modellierung und Simulation der planaren Multipolresonanzsonde

Nachweis eines kinetischen Einflusses auf die Resonanzverbreiterung im Spektrum eines Sensors zur aktiven Plasmaresonanzspektroskopie

Dieses zitieren