A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

Dennis Pohle; Christian Schulz; Moritz Oberberg; Michael Friedrichs; Alexandra Serwa; Peter Uhlig; Jens Oberrath; Peter Awakowicz; Ilona Rolfes

doi:10.23919/APMC.2018.8617552

A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

Dennis Pohle
, Christian Schulz
, Moritz Oberberg
, Michael Friedrichs
, Alexandra Serwa
, Peter Uhlig
, Jens Oberrath
, Peter Awakowicz
, Ilona Rolfes

Publikation: Beiträge in Sammelwerken › Aufsätze in Konferenzbänden › Forschung › Begutachtung

6 Zitate (Scopus)

Abstract

A novel advanced design of the planar multipole resonance probe (pMRP) using LTCC-technology is investigated in this contribution. Integrated into the reactor wall, the planar sensor structure enables a minimally invasive in-situ plasma monitoring. Due to the ceramic substrate material, a substantial improved resistance against high temperatures can be achieved, extending the potential fields of application. The used multilayer structure with vertically stacked components ensures a high level of integration and further enhances the mechanical robustness leading to an industry compatible plasma sensor design. The probe is investigated within 3D electromagnetic simulations and its applicability is demonstrated by measurements in a double inductively coupled plasma (DICP).

Originalsprache	Englisch
Titel	2018 Asia-Pacific Microwave Conference, APMC 2018 - Proceedings
Seitenumfang	3
Erscheinungsort	Piscataway
Herausgeber (Verlag)	IEEE - Institute of Electrical and Electronics Engineers Inc.
Erscheinungsdatum	02.07.2018
Seiten	1315-1317
Aufsatznummer	8617552
ISBN (Print)	978-1-5386-2184-4
ISBN (elektronisch)	978-4-9023-3945-1
DOIs	https://doi.org/10.23919/APMC.2018.8617552
Publikationsstatus	Erschienen - 02.07.2018
Veranstaltung	30th Asia-Pacific Microwave Conference 2018: Harmonious World Connected by Microwaves - Kyoto International Conference Center, Kyoto, Japan Dauer: 06.11.2018 → 09.11.2018 Konferenznummer: 30 http://www.apmc2018.org/

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Pohle, D., Schulz, C., Oberberg, M., Friedrichs, M., Serwa, A., Uhlig, P., Oberrath, J., Awakowicz, P., & Rolfes, I. (2018). A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring. in 2018 Asia-Pacific Microwave Conference, APMC 2018 - Proceedings (S. 1315-1317). Artikel 8617552 (Asia-Pacific Microwave Conference Proceedings, APMC; Band 2018-November). IEEE - Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/APMC.2018.8617552

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abstract = "A novel advanced design of the planar multipole resonance probe (pMRP) using LTCC-technology is investigated in this contribution. Integrated into the reactor wall, the planar sensor structure enables a minimally invasive in-situ plasma monitoring. Due to the ceramic substrate material, a substantial improved resistance against high temperatures can be achieved, extending the potential fields of application. The used multilayer structure with vertically stacked components ensures a high level of integration and further enhances the mechanical robustness leading to an industry compatible plasma sensor design. The probe is investigated within 3D electromagnetic simulations and its applicability is demonstrated by measurements in a double inductively coupled plasma (DICP).",

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note = "Copyright 2018 IEICE, Date Added to IEEE Xplore: 17 January 2019 ; 30th Asia-Pacific Microwave Conference 2018 : Harmonious World Connected by Microwaves, APMC 2018 ; Conference date: 06-11-2018 Through 09-11-2018",

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Pohle, D, Schulz, C, Oberberg, M, Friedrichs, M, Serwa, A, Uhlig, P, Oberrath, J, Awakowicz, P & Rolfes, I 2018, A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring. in 2018 Asia-Pacific Microwave Conference, APMC 2018 - Proceedings., 8617552, Asia-Pacific Microwave Conference Proceedings, APMC, Bd. 2018-November, IEEE - Institute of Electrical and Electronics Engineers Inc., Piscataway, S. 1315-1317, 30th Asia-Pacific Microwave Conference 2018, Kyoto, Japan, 06.11.18. https://doi.org/10.23919/APMC.2018.8617552

A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring. / Pohle, Dennis; Schulz, Christian; Oberberg, Moritz et al.
2018 Asia-Pacific Microwave Conference, APMC 2018 - Proceedings. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc., 2018. S. 1315-1317 8617552 (Asia-Pacific Microwave Conference Proceedings, APMC; Band 2018-November).

Publikation: Beiträge in Sammelwerken › Aufsätze in Konferenzbänden › Forschung › Begutachtung

TY - CHAP

T1 - A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

AU - Pohle, Dennis

AU - Schulz, Christian

AU - Oberberg, Moritz

AU - Friedrichs, Michael

AU - Serwa, Alexandra

AU - Uhlig, Peter

AU - Oberrath, Jens

AU - Awakowicz, Peter

AU - Rolfes, Ilona

N1 - Conference code: 30

PY - 2018/7/2

Y1 - 2018/7/2

N2 - A novel advanced design of the planar multipole resonance probe (pMRP) using LTCC-technology is investigated in this contribution. Integrated into the reactor wall, the planar sensor structure enables a minimally invasive in-situ plasma monitoring. Due to the ceramic substrate material, a substantial improved resistance against high temperatures can be achieved, extending the potential fields of application. The used multilayer structure with vertically stacked components ensures a high level of integration and further enhances the mechanical robustness leading to an industry compatible plasma sensor design. The probe is investigated within 3D electromagnetic simulations and its applicability is demonstrated by measurements in a double inductively coupled plasma (DICP).

AB - A novel advanced design of the planar multipole resonance probe (pMRP) using LTCC-technology is investigated in this contribution. Integrated into the reactor wall, the planar sensor structure enables a minimally invasive in-situ plasma monitoring. Due to the ceramic substrate material, a substantial improved resistance against high temperatures can be achieved, extending the potential fields of application. The used multilayer structure with vertically stacked components ensures a high level of integration and further enhances the mechanical robustness leading to an industry compatible plasma sensor design. The probe is investigated within 3D electromagnetic simulations and its applicability is demonstrated by measurements in a double inductively coupled plasma (DICP).

KW - Engineering

KW - Multipole resonance probe

KW - Plasma diagnostics

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UR - https://www.scopus.com/pages/publications/85061816491

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DO - 10.23919/APMC.2018.8617552

M3 - Article in conference proceedings

SN - 978-1-5386-2184-4

T3 - Asia-Pacific Microwave Conference Proceedings, APMC

SP - 1315

EP - 1317

BT - 2018 Asia-Pacific Microwave Conference, APMC 2018 - Proceedings

PB - IEEE - Institute of Electrical and Electronics Engineers Inc.

CY - Piscataway

T2 - 30th Asia-Pacific Microwave Conference 2018

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ER -

Pohle D, Schulz C, Oberberg M, Friedrichs M, Serwa A, Uhlig P et al. A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring. in 2018 Asia-Pacific Microwave Conference, APMC 2018 - Proceedings. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc. 2018. S. 1315-1317. 8617552. (Asia-Pacific Microwave Conference Proceedings, APMC). doi: 10.23919/APMC.2018.8617552

A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

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